China's first 2.5D/3D advanced encapsulation lithography machine was officially delivered in Shanghai

Yesterday (February 7), China's first 2.5D and 3D advanced encapsulated lithography machine developed and manufactured by Shanghai Microelectronics was officially delivered in Shanghai. This high-end equipment with high resolution, high engraving accuracy, large exposure area and other characteristics will promote the packaging/testing of integrated circuits in mainland China to improve the process level and develop new processes.

On this 2.5D/3D package lithography machine, a major technical highlight is that independent small chips such as memory, central processor, RF and interface can be integrated through system-level packaging, so as to improve the integration of chips, enhance the diversity and complexity of system functions, and effectively control product yield and cost.

At present, this packaging lithography machine manufacturing technology is only mastered by a few countries in the world. Huang Dongliang, deputy general manager of Shanghai Microelectronics Equipment (Group) Co., Ltd., said, "It can now achieve a single static exposure field of view of 60 mm by 60 mm, and we can put many different types of chips together at once and achieve their interconnection through one exposure." ”

Since 2009, Shanghai Microelectronics has developed and manufactured three generations of lithography machine products through independent research. Among them, the encapsulated lithography machine occupies more than 40% of the global market share; the domestic market share exceeds 90%, and the technical level has entered the first echelon of the world.

During the "14th Five-Year Plan" period, Shanghai Electric will also focus on technological and equipment breakthroughs in key areas to further enhance its independent innovation capabilities. Leng Weiqing, secretary of the party committee and chairman of Shanghai Electric Group, said: "For example, floating offshore wind turbines, such as offshore HVDC transmission, also include industrial steam engines, industrial gas turbines, fourth-generation nuclear power 1, 5 MW fans and so on. Scientific and technological innovation is the root and soul of our enterprise. ”

(Look at the news Knows reporter: Jin Puqing Intern Editor: Qin Yujia)