Siamatsu, Yuai Chih-ho, Damien, Kachi... Detailed explanation of semiconductor industry solutions for major representative enterprises!
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Case 1: Composite mobile robot project of a semiconductor company in Siasun
(1) Project description
Since 2015, a semiconductor company has successively applied the composite mobile robot of Shenyang Siasun Robot Automation Co., Ltd., which is used in the processing and logistics areas of the factory, mainly for the handling of semiconductor materials, and automatically grasps the materials into various processing equipment through the robotic arm to realize the automatic transfer of materials. The mobile robot body and the cooperative arm are provided by Siasun Robotics.
Figure: Siasun composite mobile robot
(2) Difficulties and innovations
1, the use of laser slam navigation technology parking positioning accuracy ± 10mm;
2. The end of the robot arm adopts 3D visual compensation, and the positioning accuracy ±0.5mm;
3. The workshop is a clean environment, and the equipment cleanliness level meets Class 100;
4. Automatic battery replacement technology, composite mobile robot can run continuously for 24 hours, meeting the user's 7x24 hours of uninterrupted work;
5. The compound mobile robot has a large cargo volume, the maximum load of the robot arm is 20KG, the maximum load of the mobile robot is 200KG, and the comprehensive cost performance is high;
6. The robot arm automatically replaces the gripper, which can handle a variety of materials;
7. Walking speed 60m/min stepless variable speed;
8. In order to meet the lengthening of the arm span of different materials and the limitation of the width of the roadway, the center of gravity and stability design of the composite mobile robot are considered.
(3) Benefits or impacts
In the year of the launch of the composite mobile robot, it was successfully applied to the digital intelligent factory of a certain enterprise, which played a certain exemplary role in the industry and also accumulated the application experience of the composite mobile robot. Composite mobile robot is the earliest application of SIASUN in the semiconductor industry, and also promotes the recognition and use of composite mobile robots in this industry application. The use of composite mobile robot handling method can greatly reduce the number of workshop personnel (about 80%) and greatly reduce the number of handling times (the scheduling system optimizes the optimal distribution plan), and improve the operation accuracy rate by 200%. Especially during the covid-19 epidemic, other enterprises are facing the situation that personnel cannot arrive at work normally, but the composite mobile robot can shuttle 24 hours in the customer's factory, effectively ensuring the user's production efficiency and economic benefits.
Case 2: Youai Zhihe wafer box handling robot project
In order to solve the daily heavy SMIF POD loading and unloading tasks, a world-leading semiconductor fab introduced youIBOT intelligent logistics solutions, and through 3 sets of Youai Zhihe wafer box handling robots, equipped with YOUIFLEET scheduling management system and YOUITMS logistics control system, completed the automatic loading and unloading between the machine and the electronic material rack and the refined management of the whole process of workshop logistics data, and realized the flexible and intelligent production of the wafer workshop.
Figure: OW8 wafer box handling robot applied in semiconductor workshops
Technical difficulties:
1. The visual positioning accuracy requires ±1mm.
2. The demand for high-frequency transfer is strict on the beat, and the manual can only move one wafer box at a time, and the wafer box handling robot can carry up to 8 wafer boxes at a time.
3, vibration is easy to produce cracks on the wafer, wafer handling process on the vibration requirements are extremely strict, wafer box handling robot in the stable transport state vibration average is much less than 0.1G.
Innovation:
1, the market general robot with up to 4 storage positions, some process wafer circulation needs reached 6 SMIF Pods, can not meet the process needs, OW8 wafer box handling robot has the industry's largest storage positions, with 8 storage positions and intelligent management of the material level, to meet all process wafer circulation needs.
2. 300-2300mm can be taken away, and the industry's highest wafer box loading and unloading height and minimum operating height advantages improve the space utilization rate of FAB.
3, manual maintenance of the elevated floor will produce potholes, wafer box handling robot comes with its own sensor to detect potholes, to prevent falling in.
4. Open up the flow of materials and information between different processes, traceable the whole process of production logistics data, and realize the visualization of workshop production and the operation control of the production process.
Semiconductor production workshop has a high level of cleanliness, complex layout, small space, and a wide variety of equipment, and Youai Zhihe opens up discrete production links through mobile robot multi-machine collaboration, and efficiently helps enterprises to flexibly produce. At the same time, the use of mobile operation robots to achieve automatic transmission, storage and distribution between process equipment, open up complex processes in the process, effectively improve the equipment turnover rate, reduce the incidence of manual errors. Achieve 0 radiation, avoid the risk of human radiation injury in the manual handling mode; 0 pollution, reduce the risk of pollution caused by dust-free workshop pollution, improve the yield rate; small vibration, avoid damage problems caused by manual handling, reduce the risk of vibration by 50%; improve efficiency, reduce operators by 30% ineffective walking; improve space utilization, improve the utilization rate of electronic shelves by 66%.
Case 3: Daming composite mobile robot wafer box loading and unloading project
A famous semiconductor factory applied Daming composite mobile robot -TM12M for wafer box loading and unloading, based on laser SLAM hybrid positioning navigation technology, to achieve indoor ±5mm of repeat positioning accuracy, effective docking of various equipment; the introduction of TM landmark patent application, after the composite machine is in place, Daming robot through its own vision to complete the high-precision loading and unloading of the wafer box.
Figure: Deming composite mobile robot applied to wafer box loading and unloading
1. After the introduction of Daming's own visual collaborative robot arm - TM12M and TM landmark, the composite mobile robot can also be easily applied to high-precision operation stations, and can also be easily debugged and copied;
2. Spatial positioning accuracy ± 0.5mm ( AGV positioning accuracy ±5mm; Through TMvision + TM Landmark, the spatial positioning accuracy is achieved ±0.5mm)
3. Daming Robot can easily complete debugging and replication through The Eye in Hand / New Base (Golden Port) quick teaching point;
4. Easier deployment: Automatically build maps without scene modification. With a variety of application modules and common standard interfaces, direct docking enterprise MES / WMS information system, no need for custom development;
5, more intelligent control: the latest generation of mobile robot distributed control system, robot single machine operation and multi-machine scheduling switch freely;
6, more stable movement: the use of 6 wheels suspension system, over the seam over the ridge smooth smooth, reduce vibration; automatically balance the load, the movement is more stable.
7, safer protection: equipped with two safety lidar, covering the robot 360 ° without dead angle;
8. More powerful scheduling: intelligent division of operation scenarios, automatic switching of working modes in different scenarios, dynamic task allocation, intelligent traffic control, multi-machine scheduling of the same scene, support for real-time monitoring and scheduling of 100 robots;
9, more durable work: each robot supports automatic charging, manual charging and rapid power exchange, the fastest 30s can allow the robot to return to the work site, to ensure 24-hour continuous operation and rapid response;
To create exclusive intelligent equipment for guests, to create a symbiotic and mutually beneficial competitive advantage, the improvement of manufacturing efficiency or the improvement of manufacturing yield, there is a very positive benefit for the entire manufacturing industry, and it has been affirmed by customers, bringing smart logistics projects to guests, helping partners save manpower, and jointly entering the smart factory of turning off the lights.
Case 4: Jiazhi Technology's internal intelligent logistics handling project of well-known semiconductor wafer production enterprises in China
The project user is a well-known semiconductor wafer manufacturer in China, and in the face of the flexible production demand of the market, it is urgent to improve the flexibility and stability of material handling in the factory.
Jiazhi Technology provides a complete set of intelligent logistics solutions covering several composite mobile operation robots, EMMA400 lift trucks, EMMA400 lift roller trucks, automatic charging piles, servers, scheduling systems CLOUDIA, etc., which efficiently solves the automatic flow and loading and unloading of raw materials and semi-finished products between various processes and equipment in the wafer production line, and greatly improves production efficiency.
Pictured: Jiazhi Technology composite mobile robot
1. Efficient operation of dust-free clean room space: Jiazhi Technology's natural navigation AMR meets the working environment standards of the 100-level dust-free workshop, and can be quickly deployed and applied to the existing production line without prior transformation, and can meet the optimization and adjustment needs of the user's production line at any time to reduce the secondary input cost;
2, the whole process of unintended, safe and stable transportation: in view of the fragile and fragile characteristics of materials in the semiconductor industry, Jiazhi fully flexible natural navigation AMR chassis + intelligent integration of collaborative robotic arms, the use of self-developed laser SLAM fusion navigation technology, flexible path planning, strong environmental adaptability, support for multi-machine collaboration, human-machine collaboration, intelligent stop and avoid obstacles, to ensure the timely safety of material distribution, all logistics information through visual real-time management at a glance;
3. Realize the accurate grasping and placement of semiconductor precision components to meet product yield requirements: Through visual assist technology and manipulator servo motion planning, it has successfully reached the 1mm level high-precision docking requirements required by users, ensuring the safety and stability of material transfer, which is very suitable for high-precision operations such as 3C and pan-semiconductor fields.
After the successful implementation of the project, it fully meets the needs of users for scheduling, helps the production line to improve production efficiency, effectively reduces labor costs, and enhances the flexible production capacity of enterprises.
Case 5: OM-T12, a clip transport robot
For a leading domestic enterprise of passive components, Youai Zhihe helped the enterprise to realize the automation upgrade and transformation of the yellow light integrated workshop, realize the automatic loading and unloading of the three major process machines of printing, exposure and development in the yellow light workshop, and the material transfer between the process machines, and solve the problems of untimely loading, wrong materials and information tracking difficulties of existing employees.
The material transfer system is composed of YOUITMS logistics management system, YOUIFLEET scheduling system and mobile operation robot; YOUITMS logistics management system docks with the customer MES system, obtains the production order for scheduling scheduling, and sends the combined order to the YOUIFLEET scheduling system, YOUIFLEET dispatching mobile operation robot, the mobile robot body is equipped with multiple material blue (production material carrier) cache positions, to complete the transfer of materials and automatic loading and unloading.
Figure: OM-T12, a clip transfer robot, is applied in the semiconductor discrete device workshop
1. The customer workshop is a compact workshop, and the composite collaborative robot needs to be loaded and unloaded in the aisle of 1100mm.
2. The unloading position on the customer's machine table is very low and the space is small, which is solved by the special structural design of the end actuator.
3. The machine has strict requirements for the accuracy of loading and unloading.
1. The mobile operation robot confirms and records the identification code on the material, and the business system can track the material flow information through the Kanban board;
2. The mobile operation robot can easily pass through the narrow aisle in the semiconductor workshop, and then through the YOUIFLEET scheduling system, the mobile operation robot will not form congestion in the aisle, and multiple robots will cooperate according to different business needs;
3. High-precision positioning of mobile operation robot and visual compensation on the robot arm support automatic loading and unloading docking, YOUITMS docking customer MES system, accepting task orders, and transmitting material operation information;
4. Data analysis, real-time feedback of production logistics data;
5. In the practice process of intelligent mobile robot system, the clever use of industrial cameras, sensors and intelligent decision-making systems and other key technical advantages makes the robot have more intelligent range capabilities. This innovative application helps more manufacturing enterprises to achieve "intelligent manufacturing" upgrades;
Greatly reduce the work intensity of workers, reduce operators by 30% ineffective walking; Open up the material handover information flow of each link, eliminating a large number of paper documents during manual handover; reduce manual operations, realize automatic loading and unloading, improve production efficiency by 33%, and improve product yield by 78%; Real-time feedback of production data, improve information transparency, reduce the error rate of the machine. Saving day shift + night shift labor savings of 20 people; return on investment: 1.6 years of return cycle.