On December 21, the core research institute announced that it recently passed the EUV PR (photoresist) reliability test of Samsung Electronics. The EUV lithography process requires EUV lithography machine and EUV photoresist, and at present, this market is mainly monopolized by Japanese manufacturers, while Samsung and South Korean semiconductor manufacturer Dongjin cooperated to develop successfully EUV photoresist, breaking the monopoly.
Edited by the Institute of Core Research
Dongjin Semiconductor developed the EUV PR at its plant in Hwaseong, Gyeonggi Province, and tested it on the Samsung Electronics Hwaseong EUV production line and has passed the reliability test, the sources said. Photoresists are key materials in semiconductor exposure processes. It is applied to the chip, when the light is illuminated with a semiconductor exposure device, a chemical reaction occurs and changes the physical properties, by flushing out the PR with a developer to draw the microcircuit, leaving only the necessary parts.
In 2019, after the dispute broke out between Japan and South Korea, the export of three important semiconductor materials to South Korea was restricted, and EUV photoresist was one of them, so Korean companies also accelerated the research and development of EUV photoresist. Although it has passed the test, it is uncertain whether Samsung will immediately use Dongjin Semiconductor's EUV photoresist on the EUV production line, and Samsung and Dongjin refuse to take a stand.
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