South Korea's first locally developed EUV photoresist passed Samsung's reliability test

Image source: ETNews

According to Jiwei Network News, Dongjin Semichem, a Supplier of Photoresist in South Korea, said that it recently passed Samsung Electronics' EUV photoresist reliability test (qualified). This photoresist is developed by both parties in cooperation, breaking the situation that South Korea's EUV photoresist is completely dependent on overseas suppliers, and is expected to be supplied to the production line in batches as soon as the first half of next year.

According to ETNews, industry insiders said, "Dongjin Shimeiken developed EUV photoresist at its Hwaseong plant in Gyeonggi Province, and tested it on Samsung Electronics' Hwaseong EUV production line and finally qualified." He added: "The cooperation between the two companies has enabled the rapid development of EUV photoresists at a high level of technology. ”

It is understood that although photoresists from the KrF and ArF fluoride processes have been mass-produced in South Korea, there is no EUV photoresist capable of drawing finer circuits. This is because development is very difficult, and most of the EUV photoresist used in South Korea is imported from Japan.

After Japan introduced export restrictions in 2019, Dongjin Shimeiken began to use its own infrastructure, such as existing argon fluoride exposure machines and EUV equipment from the Belgian Semiconductor Research Institute (IMEC), to localize EUV photoresist. At the same time, Samsung provided an EUV test environment and successfully improved the quality of the photoresist, enabling it to be successfully applied.

Whether Samsung will immediately use Semeiken's EUV photoresist on its semiconductor production line remains to be seen. Typically, tests are passed and used for high-volume production. Therefore, some people predict that it will be supplied as early as the first half of next year.

The two sides declined to comment to ETNews on whether the EUV photoresist certification passed. Samsung said: "It is impossible to confirm with partners whether it has passed the EUV photoresist verification" and "we are working hard to diversify semiconductor materials, components, and equipment (sources)."

(Proofreading/Holly)