EUV lithography process in addition to the need for EUV lithography machine, but also need to support the EUV photoresist, the current market is also mainly monopolized by Japanese manufacturers, and now Samsung and South Korean semiconductor manufacturers Dongjin cooperation to develop successful EUV photoresist, has been verified.
Dongjin Semiconductor announced on the 19th that it recently passed Samsung Electronics' EUV PR (photoresist) reliability test.
Dongjin Semiconductor developed the EUV PR at its plant in Hwaseong, Gyeonggi Province, and tested it on the Samsung Electronics Hwaseong EUV production line and has passed the reliability test, the sources said.
PR, also known as photoresist, is a key material in the semiconductor exposure process.
It is applied to the chip, when the light is illuminated with a semiconductor exposure device, a chemical reaction occurs and changes the physical properties, by flushing out the PR with a developer to draw the microcircuit, leaving only the necessary parts.
In 2019, after the dispute broke out between Japan and South Korea, the export of three important semiconductor materials to South Korea was restricted, and EUV photoresist was one of them, so Korean companies also accelerated the research and development of EUV photoresist.
Although it has passed the test, it is uncertain whether Samsung will immediately use Dongjin Semiconductor's EUV photoresist on the EUV production line, and Samsung and Dongjin refuse to take a stand.
![The national boiled up Samsung exposure major technological breakthrough EUV photoresist successfully developed[fig]](data:image/gif;base64,R0lGODlhAQABAIAAAP///wAAACwAAAAAAQABAAACAkQBADs=)