Drumming urges the march The first stick of the new spring is transferred from single research and development to mass production Integrated circuit equipment has been marked with the mark of Hunan

Hunan Daily all-media reporter Wang Mingjun

Correspondent Zhang Xing, Yan Jing, Feng Guanhua

On the morning of February 10, in the semiconductor equipment mass manufacturing plant of the 48th Research Institute of China Electronics Technology Group Corporation (hereinafter referred to as "48 Institute"), more than 20 vertical and horizontal high-temperature furnace tube equipment displays were constantly beating.

These high-temperature furnace tube equipment is one of the key equipment for the production of integrated circuits.

"How important are integrated circuits? If the chip is likened to a book, then semiconductors are the raw materials for making these books, and integrated circuits are the words and patterns on the books. ”

Making integrated circuits is also like "carving different words and drawing different patterns on the chip." Gong Xiaoliang, a senior engineer at the Forty-Eight Institute, told reporters that the equipment developed by the Forty-Eight Institute has now served more than half of the processes in the process of making integrated circuits.

"We are transforming from a traditional single scientific research model to a new research and development model that attaches equal importance to scientific research and production." Walking into the bright and clean factory, Wang Ping, director of the Forty-Eight Institute, proudly pointed to the batch equipment lined up side by side, "In the past, to do scientific research, we only needed to develop 1 or 2 such equipment. After entering the mass production stage, we will not only develop equipment, but also explore mature processes to deliver to users, and will ship more than 100 units this year. ”

"Tick tock..." A horizontal diffuser self-test system beeps. Huang Zhihai, the leader of the horizontal furnace pipe equipment research group, quickly found the abnormal part of the process simulation through the bullet screen prompt on the equipment self-test display, and then operated according to the pop-up troubleshooting operation prompt. In less than a minute, the device was back to normal operation. Similarly designed, it is easy and convenient to help users troubleshoot and solve faults on site.

Scientific research and production feed back to each other. "Our nearly 600 staff members are refining various small technologies every day, striving to forge new equipment and new products." Wang Ping introduced that after assembly and repeated debugging in the semiconductor equipment mass manufacturing plant, the key equipment of integrated circuits such as high-temperature furnace tubes and magnetron sputtering deposition equipment marked with the Hunan seal will be shipped to major chip manufacturing enterprises in China.

In 1964, the Forty-Eight Institute was established in Changsha. After nearly 60 years of ups and downs, it has developed into the lead unit of the National Third Generation Semiconductor Technology Innovation Center (Hunan).

[Editor-in-charge: Wan Zhidian]

[Source: Hunan Daily· New Hunan Client]