First author: Xiaolong Xu
Corresponding author: Yu Ye
Communication unit: Peking University, Collaborative Innovation Center for Quantum Matter
Integrating two-dimensional (2D) van der Andys semiconductors into silicon electronics technology will require the production of large-scale, homogeneous and highly crystalline films. Recently, the Yu Ye group of Peking University and the Collaborative Innovation Center for Quantum Matter reported the way to synthesize wafer-level monocrystalline 2H molybdenum di telluride (MoTe2) semiconductors on amorphous insulated substrates. Deliberately implanted individual seedings triggered planar 2D epitaxial growth through tellurium. The resulting single crystal film completely covers the 2.5 cm wafer with excellent uniformity. The 2H MoTe2 2D single crystal film can use itself as a template for further rapid extension in a vertical manner. Transistor arrays fabricated from the prepared 2H MoTe2 monocrystalline have high electrical properties, excellent uniformity, and 100% device yield.
Figure 1: Seed growth of a single crystal 2H MoTe2 disc
Figure 2: TEM characterization around seed areas
Figure 3: EBSD characterization of monocrystalline MoTe2 at the wafer level
Figure 4: Electrical characteristics of a FET device prepared on a 2H MoTe2 monocrystalline thin film
Original link:
https://science.sciencemag.org/content/372/6538/195
Homepage of the research group:
https://icqm.pku.edu.cn/yw/directory/faculty/associatulty_en/237452.htm