Recently, Suzhou Sensing Communication Information Technology Co., Ltd. (hereinafter referred to as "Sensing Communication"), a subsidiary of Daoyuan Group, has once again released six 1D MEMS galvanometer module products with different mirror sizes that can be mass-produced after announcing a number of self-developed 2D MEMS galvanometer module products last year.
Sealing and testing workshop
© Sensing pass
The MEMS galvanometer module expands a new one-dimensional series of products through different mirror sizes, which can be adopted by industries such as lidar and industrial robots, as well as companies, research institutions and colleges engaged in the research and development of related technology products.
According to the information released by Sensing, MEMS galvanometers in the optical scanning system have the following advantages compared with traditional mechanical galvanometers:
- MEMS material monocrystalline silicon, no fatigue, has unlimited service life within the ultimate stress;
- There is no plastic deformation at 1000 degrees Celsius, no mechanical assembly gap displacement or wear, and the repeatability is extremely high and stable;
- Elastic deformation, smooth stepless movement, high-precision control can bring high-precision resolution;
- Semiconductor tape-out, chip-scale packaging, integrated measurement and control, small size, reliable and stable.
The chip team of Suzhou Sensing Communication Information Technology Co., Ltd. has developed a series of MEMS galvanometer module products within two years.
This series of MEMS galvanometer products have undergone the rigorous reliability test of the Conductive Vehicle Specification Test Center. The internal impact of various types of modules has passed the 1000G, the sweeping frequency vibration in 3 directions has passed 15G, and the 85° high temperature aging has passed the 1000h test, and the performance is normal.
From left to right: module impact test, module sweep vibration test, high temperature aging test
These 2D galvanometer modules can be used for raster scanning. High precision, small size, large angle.
From left to right: 5*7mm 2D galvanometer module, 8mm 2D galvanometer module, 10mm 2D galvanometer module
The 2D galvanometer module adopts a single-channel drive to meet the effect of simultaneous scanning of fast and slow axes, the fast axis is excited by the resonant signal to resonate the mode sinusoidal scanning, and the slow axis can be customized to scan the frequency modulation signal at a constant speed, so as to form a raster scan.
Raster scan trajectory plot
Because the piezoresistive feedback is directly fabricated on the torsion beam of the fast and slow axes of the galvanometer chip by the semiconductor process, the position signal output directly by the feedback is less disturbing and does not fail than the external sensor of the photoelectric or grating attached to the mechanical galvanometer. The development driver board provided by SenSense provides a dual-axis feedback signal output port, and the line signal when the slow axis frame signal is reversed from the fast axis under 2D raster scanning.
Feedback signal under raster scanning: the green line is the slow axis angle feedback signal, the yellow line is the fast axis angle feedback signal, and the red line is the fast axis reverse pulse signal
The driver development board is the communication control board on the left and the driver board is the driver board on the right
The newly launched series of smaller 1D galvanometers can meet more application scenarios, including quasi-static and high-frequency resonant modes, all of which are equipped with corresponding development boards for customers to expand application scenarios.
From left to right: quasi-static 8mm 1D galvanometer, resonant 8mm 1D galvanometer, 20*12mm 1D galvanometer
Focusing on the R&D and production of MEMS galvanometers, SensingTong has independent chip design capabilities, a complete industrial chain, controllable MEMS galvanometer processing technology and packaging process, and the module cost will be steadily reduced with the growth of output, providing a guarantee for the large-scale mass production and application of MEMS galvanometers.
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