For non-lithography solutions, Canon began selling 5nm chip production equipment

IT House News on October 14, Canon (Canon) recently issued a press release to start selling chip production equipment FPA-1200NZ2C, indicating that 5 nm chips can be manufactured using a solution different from complex lithography technology.

Canon said that the production equipment works differently from the industry leader ASML, and is not lithography, but more similar to printing, without using the principle of image projection to transfer the microstructure of integrated circuits to silicon wafers.

The device can be applied to silicon wafers as small as 14 square millimeters, allowing the production of chips equivalent to 5nm processes.

Canon said it will continue to improve and develop the system, which is expected to be used to produce 2nm chips in the future.

Nanoprinted lithography is often considered a low-cost alternative to optical lithography, and memory chip manufacturers such as SK Hynix and Kioxia have tried to use it in the past. Kioxia had previously conducted tests, but potential customers complained that the product defect rate was high, and finally chose to give up.